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Flexible tool for two-photon laser nanoprocessing and large area mapping with high resolution

: Bruneel, D.; Audouard, E.; König, K.; Harzic, R. le


Optics and Lasers in Engineering 48 (2010), Nr.12, S.1278-1284
ISSN: 0143-8166
Fraunhofer IBMT ()

A high accurate, compact and flexible laser nanoprocessing and large area mapping with high-resolution apparatus is presented in this paper. Judicious hardware and software developments of the device are presented, which allow a high range of applications and performances. Coupled to a low average and low cost femtosecond laser system, results on accurate nanoprocessing on biological and biotechnological samples demonstrate the potential of the machine. Nanostructuring of different type of materials with this device is conceivable for a wide spectrum of technological applications in material science, nanobiotechnology and nanomedicine.