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Beschichtung und Reinigung von Oberflächen mit Atmosphärendruck-Plasmen

Coating and cleaning of surfaces with atmospheric pressure plasmas
: Klages, C.-P.; Eichler, M.


Vakuum in Forschung und Praxis 14 (2002), Nr.3, S.149-155
ISSN: 0947-076X
ISSN: 1522-2454
Fraunhofer IST ()

Since long time dielectric barrier discharges have been in use for technical applications such as ozone synthesis and surface activation treatment of polymers for subsequent printing, pasting, or laquering. A new field of applications for these discharges is opened by their use for plasma-based coating and cleaning processes at atmospheric pressure. By introducing gaseous monomers (like hydrocarbons, fluororcarbons, silicon-organic compounds) into the discharge zone, coatings can be deposited on electrically conductive or insulating substrates. Barrier discharges in oxygen containing gases can also be used for the degreasing of surfaces. Owing to the possibility, to sustain barrier discharges in very small volumes, new perspectives are opened for the geometrically structured modification of chemical and physical properties of surfaces as well as for the modification or coating of internal surfaces in microfluidic devices.