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Manufacturing, characterization, and application of nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy

Poster at MNE 2010, 36th International Conference on Micro and Nano Engineering, Genoa, Italy
 
: Jambreck, J.D.; Yanev, V.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.

:
Poster urn:nbn:de:0011-n-1433286 (1.1 MByte PDF)
MD5 Fingerprint: 86b1b75661b43df4172ea8956b915e57
Erstellt am: 20.10.2010


2010, 1 Folie
International Conference on Micro and Nano Engineering (MNE) <36, 2010, Genoa>
Englisch
Poster, Elektronische Publikation
Fraunhofer IISB ()
metal tip; nanoimprint lithography; scanning probe microscopy; FIB; TUNA; SCM; NIL; SPM; AFM; atomic force microscopy; scanning capacitance microscopy; focused ion beam

: http://publica.fraunhofer.de/dokumente/N-143328.html