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Study on laser parameters for silicon solar cells with LCP selective emitters

: Hopman, S.; Fell, A.; Mayer, K.; Fleischmann, C.; Drew, K.; Kray, D.; Granek, F.


Sinke, W. ; WIP - Renewable Energies, München; European Commission; UNESCO; World Council for Renewable Energy; International Photovoltaic Equipment Association:
24th European Photovoltaic Solar Energy Conference 2009. CD-ROM : The compiled State-of-the-Art of PV Solar Technology and Deployment. Proceedings of the International Conference held in Hamburg, 21-25 September 2009
München, 2009
ISBN: 3-936338-25-6
European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC) <24, 2009, Hamburg>
Fraunhofer ISE ()

In this paper Laser Chemical Processing (LCP) is used for high local doping of selective emitters. In order to find influencing laser parameters on LCP selective emitters, high-efficiency Si solar cells with size of 2x2 cm2 cells were processed. The highly doped emitters were processed with different laser powers to see the influence on grooving form and pulse energies. In order to find out if there is a contact resistance problem because of an isolating PSG layer, solar cells with and without PSG etch after the LCP selective emitter formation were compared. Laser induced damage is investigated for low and high pulse energies with TEM. This shows no dislocations for low laser power and small regions of dislocations for high laser power.