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2010
Conference Paper
Titel
Direct laser interference patterning of tetrahedral amorphous carbon thin films
Titel Supplements
Abstract
Abstract
In this work, we report on the surface functionalization of hydrogen-free tetrahedral amorphous carbon (ta-C) thin films using laser patterning. Periodic micro and sub-micrometer arrays on large areas were fabricated with direct laser interference patterning and an UV nanosecond laser (266 and 355 nm). The smallest structures we produced by this method had a full width at half maximum of ~ 90 nm. The thin film modifications are investigated by optical microscopy, atomic force microscopy (AFM), scanning electron microscopy (SEM) and Raman spectroscopy. The results indicate that depending on the laser fluence, the tetrahedral carbon either graphitizes, crystallizes or ablates at the interference maximum positions. The graphitization and delamination of carbon thin films depend on the film th ickness and density. In particular, the delamination threshold increases with the film thickness, whereas the graphitization threshold depends on the film absorption. Numerical calculations of the optical absorption of the different carbon films corroborated the experimental results.