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Microfabrication of planar waveguide devices on LiNbO3

 
: Doldissen, W.; Heidrich, H.; Hoffmann, D.

Kersten, R.T. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Integrated Optical Circuit Engineering III
Bellingham/Wash.: SPIE, 1986 (SPIE Proceedings Series 651)
ISBN: 0-89252-686-6
S.15-19
Integrated Optical Circuit Engineering <3, 1986, Innsbruck>
Englisch
Konferenzbeitrag
Fraunhofer HHI ()
electro-optical devices; integrated optics; optical waveguides; optical workshop techniques; planar electrooptical waveguide device; pattern generation; switching modules; linbo3

Abstract
Tolerances in the process technology of planar electrooptical waveguide device on LiNbO3 are described with emphasis on pattern generation for switching modules of higher complexity.

: http://publica.fraunhofer.de/dokumente/N-13964.html