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Self-aligned low-loss totally reflecting waveguide mirrors in InGaAsP/InP

: Niggebrugge, U.; Albrecht, P.; Doldissen, W.; Nolting, H.-P.; Schmid, H.

Wilkinson, C.D.W.:
Fourth European Conference on Integrated Optics 1987. Proceedings
Glasgow: SETG, 1987
European Conference on Integrated Optics (ECIO) <4, 1987, Glasgow>
Fraunhofer HHI ()
gallium arsenide; gallium compounds; iii-v semiconductors; indium compounds; integrated optics; mirrors; optical losses; optical waveguides; methane-h2 plasma; semiconductor; design; fabrication; performance; totally reflecting waveguide mirrors; 90 degrees directional change; monomode rib waveguides; 1.5 db; linbo3; litao3; linbo3

The authors report on the design, fabrication and performance of totally reflecting waveguide mirrors for a 90 degrees directional change of monomode rib waveguides in the InGaAsP/InP material system. The precise lateral position and angular orientation of the mirror relative to the waveguides is ensured to a high degree by employing a self-aligning method. Waveguide mirrors etched by RIE in a CH4/H2 plasma show an average loss of only 1.5 dB each for 4 and 8 devices in series.