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Conventional and reversed image printing in electron beam direct write lithography with proximity effect corrections based on dose and shape modification

: Choi, K.-H.; Gutsch, M.; Freitag, M.; Keil, K.; Jaschinsky, P.; Hohle, C.


Herr, D.J.C.:
Alternative lithographic technologies II : 23 - 25 February 2010, San Jose, California, United States
Bellingham, WA: SPIE, 2010 (SPIE Proceedings 7637)
ISBN: 978-0-8194-8051-4
Advanced Lithography Conference <2, 2010, San Jose>
Fraunhofer CNT ()

For shortening the writing time, especially in shaped Electron Beam Direct Writing (EBDW), it is crucial to reduce the number of shapes and the coverage of layout for exposure. The determination of conventional or reversed image printing according to the process integration is one of the concerns for time and cost-effective process in the EBDW. We have studied two different cases for the purpose above. First, the proximity effect correction (PEC) with dose modification applied on each tone of resists, positive and negative, for the printing of conventional and reversed images. The CDs that are obtained from the both printed images compared and are either with that from the simulations. Secondly, the two different types of PEC, dose and shape modification, applied to a conventional image using an identical point spread function (PSF). The line edge roughness (LER), line width roughness (LWR) and CDs in dose and shape corrected conventional image pattern have been measured and compared. The MGS/PROXECCO was used for all the preparation of exposure data mentioned above. In summary, we suggest the strategies of efficient PEC for the EBDW of contrasting images, propose the available method of PEC for the time-efficient EBDW, and for the further multiple EBDW developments.