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Novel equipment for friction force measurement on MEMS and micro components

: Schmidt, M.; Wortmann, A.; Lüthje, H.; Büttgenbach, S.


Behringer, U.F.W. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MEMS design, fabrication, characterization, and packaging : 30 May - 1 June 2001, Edinburgh, UK
Bellingham/Wash.: SPIE, 2001 (SPIE Proceedings Series 4407)
ISBN: 0-8194-4108-2
Conference "MEMS Design, Fabrication, Characterization, and Packaging" <2001, Edinburgh>
Fraunhofer IST ()
friction; microactuator; tester; measurement system

The importance of micro actuators will increase dramatically in the near future. Micro actuators only capable of generating low forces, therefore surfaces in dynamic contact must be tribologically optimized. Since component and thin film properties may differ from their bulk material behaviour and in order to investigate the influence of the components geometries, it is important to investigate the effect of friction in micro actuators under comparable test conditions. To enable such in-situ investigations two testing units have been designed and built up at the IMT and IST. We report on the design of these devices.