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Self-aligned waveguide mirrors for optical integration on InGaAsP/InP

: Albrecht, P.; Doldissen, W.; Niggerbrugge, U.; Nolting, H.P.; Schmid, H.

Institute of Electrical and Electronics Engineers -IEEE-; Institution of Electrical Engineers -IEE-, London:
ECOC 87. 13th European Conference on Optical Communication. Technical Digest. Vol.1 : Helsinki, Finland, 13-17 Sept 1987
Helsinki, 1987
European Conference on Optical Communication (ECOC) <13, 1987, Helsinki>
Fraunhofer HHI ()
gallium arsenide; gallium compounds; iii-v semiconductors; indium compounds; integrated optics; mirrors; optical losses; optical waveguide components; self-aligned waveguide mirrors; oeics; totally reflecting mirrors; iii-v semiconductor; optoelectronic integrated circuits; optical communication systems; optical integration; monomode rib waveguides; reactive ion etching; loss mechanisms; 1.5 db; InGaAsP-InP

Totally reflecting mirrors for monomode rib waveguides in InGaAsP/InP were fabricated by reactive ion etching using a self-aligning technique. For eight mirrors in series an average excess loss of 1.5 dB per mirror was observed. The loss mechanisms are discussed.