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Development of PZT thick film actuators for active micro-optics

Poster at 12th International Conference on New Actuators and 6th International Exhibition on Smart Actuators and Drive Systems, ACTUATOR 2010. Bremen, 14. - 16 Juni 2010
 
: Bramlage, B.; Gebhardt, S.

:
Poster urn:nbn:de:0011-n-1373951 (400 KByte PDF)
MD5 Fingerprint: 92896561f549dec668461d4c33616da5
Erstellt am: 5.8.2010


2010, 1 S.
International Conference on New Actuators and Drive Systems (ACTUATOR) <12, 2010, Bremen>
International Exhibition on Smart Actuators and Drive Systems <6, 2010, Bremen>
Englisch
Poster, Elektronische Publikation
Fraunhofer IKTS ()
thick film; PZT; screen printing; actuator; LTCC; Al2O3

Abstract
We present our ongoing research effort to establish PZT thick film actuators on LTCC and alumina substrates in active micro-optics. The main focus of this work lies in the challenges met in the miniaturization of cantilever actuators with special regard to the dielectric and electromechanical properties of the PZT thick film layer.

: http://publica.fraunhofer.de/dokumente/N-137395.html