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1995
Journal Article
Titel
Active silicon CMOS addressing matrices for light-valve projection displays
Abstract
In the second part of this three-paper series, the design and the fabrication of monolithic active matrices for addressing metallized viscoelastic light-valve control layers are described together with the required external electronics. The active matrices were fabricated by means of standard silicon CMOS technology. Special matrix features are signal-handling capabilities of 30 V, optimized surface planarity and extremely low light sensitivity. The on-chip addressing circuitry exceeds HDTV speed requirements. Three identical matrix samples coated with metallized viscoelastic control layers were successfully demonstrated as spatial light modulators for the read-out light from a xenon are lamp in a full-colour schlieren-optical dark-field projection system. Results obtained with medium-sized active matrices are presented; larger matrix versions were already fabricated in small numbers, but not yet tested.
Tags
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CMOS integrated circuits
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elemental semiconductors
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high definition television
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integrated circuit technology
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large screen displays
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optical films
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optical projectors
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packaging
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semiconductor technology
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silicon
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spatial light modulators
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viscoelasticity
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cmos addressing matrices
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light-valve projection display
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design
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fabrication
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monolithic active matrices
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metallized viscoelastic light-valve control layers
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standard silicon cmos technology
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optimized surface planarity
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on-chip addressing circuitry
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HDTV
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read-out light
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xenon are lamp
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colour schlieren-optical dark-field projection system
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medium-sized active matrices
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30 V
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Si