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1995
Conference Paper
Titel
Exposure and characterization of super structure gratings for DBR lasers generated by direct write electron-beam lithography
Abstract
Semiconductor lasers with a wide tuning range can be fabricated with the use of super structure gratings (SSG). In this paper we give a short introduction to SSGs, the technical problem of their realization and the existing techniques to generate SSGs. A method is presented to generate 'true' continuously chirped gratings overcoming the technical restrictions. Furthermore we make a proposal on how to characterize SSGs in resist profiles.