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Sensitivity increase for coating thickness determination using THz waveguides

: Theuer, M.; Beigang, R.; Grischkowsky, D.

Postprint (1 MByte; PDF; )

Optics Express 18 (2010), Nr.11, S.11456-11463
ISSN: 1094-4087
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IPM ()
terahertz spectroscopy

We report on layer thickness determination down to a thickness of 2.5 microns using terahertz waveguide spectroscopy. Compared to typical single-pass transmission measurements in the time domain, the effective THz pulse delay is considerably increased for a given layer thickness by using the high filling factor of the THz waveguide. This corresponds to a sensitivity increase up to a factor of 50 for the measured delay, allowing the direct measurement of layer thicknesses down to below hundredths of a THz wavelength.