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Multispectral characterization of diffractive micromirror arrays

: Berndt, D.; Heber, J.; Sinning, S.; Kunze, D.; Knobbe, J.; Schmidt, J.-U.; Bring, M.; Rudloff, D.; Friedrichs, M.; Rössler, J.; Eckert, M.; Kluge, W.; Neumann, H.; Wagner, M.; Lakner, H.

Volltext urn:nbn:de:0011-n-1333218 (2.0 MByte PDF)
MD5 Fingerprint: 715454297d0e0ee76e9de8e90fc79ab9
Erstellt am: 8.6.2016

Gorecki, C. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Optical Micro- and Nanometrology III : 13 - 16 April 2010, Brussels, Belgium
Bellingham, WA: SPIE, 2010 (Proceedings of SPIE 7718)
ISBN: 978-0-8194-8191-7
Paper 77180Q
Conference "Optical Micro- and Nanometrology" <3, 2010, Brussels>
European Commission EC
FP7; 215597; MEMI
Konferenzbeitrag, Elektronische Publikation
Fraunhofer IPMS ()

The present article discusses an optical concept for the characterization of diffractive micromirror arrays (MMAs) within an extended wavelength range from the deep ultra-violet up to near-infrared. The task derives from the development of a novel class of MMAs that will support programmable diffractive properties between 240 nm and 800 nm. The article illustrates aspects of the achromatic system design that comprises the reflective beam homogenization with divergence control and coherence management for an appropriate MMA illumination as well as the transfer of phase modulating MMA patterns into intensity profiles for contrast imaging. Contrast measurements and grey scale imaging demonstrate the operation of the characterization system and reflect the encouraging start of technology development for multispectral, diffractive MMAs.