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MEMS devices for laser camera systems for endoscopic applications

: Drabe, C.; James, R.; Schenk, H.; Sandner, T.


Schenk, H. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and miniaturized systems IX : 25 - 27 January 2010, San Francisco, California, United States; at SPIE Photonics West
Bellingham, WA: SPIE, 2010 (Proceedings of SPIE 7594)
ISBN: 978-0-8194-7990-7
Paper 759404
Conference "MOEMS and Miniaturized Systems" <9, 2010, San Francisco/Calif.>
Photonics West Conference <2010, San Franciso/Calif.>
Fraunhofer IPMS ()

In 2007 IPMS and MVIS presented the results of a full colour scanned beam imaging system. In this paper we will in addition give an update on the technological development on die level since the last paper. The already small die size of 3000 µm x 2300 µm was further reduced to less than 2000 µm x 2000 µm. The new devices consist of a moveable frame oscillating at frequencies in the range of 700 Hz - 900 Hz and 1400 Hz - 1800 Hz carrying a mirror of 350 µm diameter in a gimbal mounting. The mirrors oscillate at frequencies in the range of 13-15 kHz. The characteristic mechanical amplitudes are 21° MSA (mechanical scan angle) for the frame and 28° MSA for the mirror respectively. Voltages of less than 50 V for the frame and 100 V for the mirror were necessary to accomplish this. The improved MEMS device design is presented as well as the related measurement results. The images of various objects taken with an optical system using the former devices are presented revealing the excellent resolution of such a system and enabling an outlook on the possibilities of the new device.