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On-chip programmable monolithic integrated pressure sensor for high pressure applications

: Trieu, H.K.; Köster, O.; Knier, M.; Kappert, H.; Mowka, W.

Verband der Elektrotechnik, Elektronik, Informationstechnik -VDE-:
MICRO.tec 2000. VDE World Microtechnologies Congress: Applications - Trends - Visions. Proceedings. Vol.1 : VDE World Microtechnologies Congress, September 25 - 27, 2000, Expo 2000, Hannover, Germany
Berlin: VDE-Verlag, 2000
ISBN: 3-8007-2579-7
World Microtechnologies Congress (MICROTEC) <2000, Hannover>
Fraunhofer IMS ()
calibration; micromachining; linearisation techniques; pressure sensor; stability; EPROM; microsensor; CMOS integrated circuits; compensation; capacitive sensor

This paper introduces a novel family of monolithic integrated surface micromachined pressure sensors with both linearization and temperature compensation done on-chip. All sensor parameters are fully programmable and on-chip stored using integrated EEPROM. Surface micromachined capacitive pressure sensors are pre-destinated for monolithic integrated sensor systems due to their compatibility to a standard CMOS process. This enables a cost effective production. Compared with piezoresistive pressure sensors, the surface micromachined pressure sensors are superior with respect to high overpressure stability, simple packaging, ease of monolithic integration of signal conditioning electronics, low power consumption and small chip size.