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Remote CMOS pressure sensor chip with wireless power and data transmission

: Boom, T. van den; Teßmann, D.; Lerch, R.G.; Bögel, G. vom; Hammerschmidt, D.; Amelung, J.; Hosticka, B.J.; Mahdavi, P.

Wuorinen, J.H.; Martin, J.N.; Olivari, B.A. ; Institute of Electrical and Electronics Engineers -IEEE-:
IEEE International Solid-State Circuits Conference 2000. Digest of technical papers
New York, NY: IEEE, 2000
ISBN: 0-7803-5853-8
ISBN: 0-7803-5854-6
ISBN: 0-7803-5855-4
ISBN: 0-7803-5856-2
S.186-187(Hauptband), 456
International Solid-State Circuits Conference (ISSCC) <47, 2000, San Francisco/Calif.>
Fraunhofer IMS ()
energieautark; transponder; wireless; batteryless; pressure sensor; chip; drahtlose Übertragung; Drucksensor; chip; passiver transponder

We present a single chip wireless pressure sensor system containing on-chip capacitive pressure arrays, temperature sensor, voltage reference, SC 10bit cyclic ADC, controller, EEPROM and ASK multi-tag RF transponder (133kHz). Carrier power is used for batteryless operation up to 1 m distance. The chip size is 15mm² in 1.5µm CMOS and it consumes less then 180µW during measurement.