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Combinatorial synthesis of thin mixed oxide-films and examinations of their piezoelectricity by ultrasonic piezo-mode imaging

: Rende, D.; Maier, W.F.; Schwarz, K.; Rabe, U.; Arnold, W.

Postprint urn:nbn:de:0011-n-1298007 (1.4 MByte PDF)
MD5 Fingerprint: 8d27fb876ceb2e6e18e1ed826fd116f3
The original publication is available at
Erstellt am: 9.7.2010

Perner, P.:
Advances in mass data analysis of signals and images in medicine, biotechnology and chemistry : International conference, MDA 2006/2007, Leipzig, Germany, July 18, 2007; Selected papers
Berlin: Springer, 2007 (Lecture Notes in Artificial Intelligence 4826)
ISBN: 3-540-76299-X
ISBN: 978-3-540-76299-7
ISSN: 0302-9743
International Conference on Mass Data Analysis of Images and Signals in Medicine, Biotechnology and Chemistry (MDA) <2007, Leipzig>
Konferenzbeitrag, Elektronische Publikation
Fraunhofer IZFP ()
PZT; AFM; combinatorial chemistry; high-throughput; sol-gel synthesis

The development of an automated production of thin films and the characterization of their piezoelectric properties in high-throughput is described. A library of 50 undoped as well as doped lead zirconate titanate Pb(Zr,Ti)O3 (PZT) coatings was produced by sol deposition. Afterwards, the piezoelectric properties of the library films were analyzed by automated atomic force microscopy employing the ultrasonic piezo-mode.