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A novel functionalization of AlGaN/GaN-pH-ISFETs for DNA-sensors

Eine neuartige Funktionalisierung von AlGaN/GaN-pH-Sensoren für die DNA-Sensorik
: Linkohr, S.; Schwarz, S.U.; Krischok, S.; Lorenz, P.; Nakamura, T.; Polyakov, V.M.; Cimalla, V.; Nebel, C.E.; Ambacher, O.


Gwo, S.; Ager, J.W.; Ren, F.; Ambacher, O.; Schowalter, L. ; Materials Research Society -MRS-:
III-Nitride Materials for Sensing, Energy Conversion and Controlled Light-Matter Interactions : Symposium I held November 29 - December 3, 2009, Boston, Massachussetts, U.S.A., held ... at the 2009 MRS fall meeting
Warrendale, Pa.: MRS, 2010 (Materials Research Society Symposium Proceedings 1202)
ISBN: 978-1-60511-175-9
ISSN: 0272-9172
Symposium I "III-Nitride Materials for Sensing, Energy Conversion and Controlled Light-Matter Interactions" <2009, Boston/Mass.>
Materials Research Society (Fall Meeting) <2009, Boston/Mass.>
Fraunhofer IAF ()
Biosensorik; Feldeffekttransistor; Elektronenspektroskopie; biofunctionalization; Biosensor; field effect transistor; electron spectroscopy

AlGaN/GaN pH sensitive devices were functionalized and passivated for the use as selective bio-sensors. For the passivation, a multilayer of SiO2 and SiNx is proposed, which stabilizes the pH-sensor, is biocompatible and has no negative impact on the following biofunctionalization. The functionalization of the GaN-surface was achieved by covalent bonding of 10-amino-dec-1-ene molecules by a photochemical process. After two different surface preparations islands of TFAAD are growing on the sensor surface by exposure with UV-light. In dependence on the surface pre-treatment and the illumination wavelength the first monolayer is completed after 3 h or 7 h exposure time dependent on the pre-treatment and illumination wavelength. Further exposure results in thicker films as a consequence of cross polymerization. The bonding to the sensor surface was analyzed by X-ray photoelectron spectroscopy, while the thickness of the functionalization was determined by atomic force microscopy scratching experiments. These functionalized devices based on the pH-sensitive AlGaN/GaN ISFET will establish a new family of adaptive, selective biomolecular sensors such as selective, reusable DNA sensors.