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Fabrication of metallic SPM tips by combining UV nanoimprint lithography and focused ion beam processing

Herstellung metallischer Spitzen für die Rastersondenmikroskopie mittels UV-Nanoimprint Lithographie und Bearbeitung durch fokussierte Ionenstrahlen
: Jambreck, J.D.; Schmitt, H.; Amon, B.; Rommel, M.; Bauer, A.J.; Frey, L.


Microelectronic engineering 87 (2010), Nr.5-8, S.1123-1126
ISSN: 0167-9317
International Conference on Micro and Nano Engineering (MNE 2009) <35, 2009, Ghent>
Zeitschriftenaufsatz, Konferenzbeitrag
Fraunhofer IISB ()
full metal tip; scanning probe microscopy; focused ion beam; nanoimprint lithography; atomic force microscopy; SPM; FIB; NIL; UV-NIL; AFM; scanning spreading resistance microscopy; SSRM; scanning capacitance microscopy; SCM; conductive AFM; c-AFM

UV nanoimprint lithography (UV-NIL) is applied for the fabrication of metallic scanning probe microscopy (SPM) tips. The NIL templates are generated by focused ion beam (FIB) processing. The tips are imprinted by UV-NIL using a resist which is a mixture of Ag particles and an UV-curing polymer. After imprinting, tips are further shaped by FIB to achieve a high aspect ratio and a small radius at the apex. The resulting tips are analyzed and methods for increasing the metal-to-polymer ratio are presented and discussed.