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Nanoreliability - Reliability Research for Microsystem Technology on the way from Micro to Nano
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2008
Journal Article
Titel
Nanoreliability - Reliability Research for Microsystem Technology on the way from Micro to Nano
Author(s)
Michel, B.
Winkler, T.
Werner, M.
Fecht, H.
Zeitschrift
MST News
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM