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A single-chip smart pressure sensor family with 2 dimensional calibration

 
: Weiler, D.; Machul, O.; Hammerschmidt, D.; Amelung, J.; Hosticka, B.J.

Krüger, S.; Gessner, W.:
Advanced microsystems for automotive applications 2000
Berlin: Springer, 2000
ISBN: 3-540-67087-4
S.289-295 : Lit.
Conference Advanced Microsystems for Automotive Applications (AMAA) <2000, Teltow>
Englisch
Konferenzbeitrag
Fraunhofer IMS ()
linearization; temperature compensation; single chip pressure transducer; surface-micromachined capacitive sensor; parallel calibration; sensor readout circuit; Druckaufnehmer; Linearisierung; Temperaturkompensation; Kondensator-Schalter-Technik; Kalibriereinrichtung

Abstract
We present a single-chip CMOS solution for a pressure transducer reaching an 1% accuracy over the temperature range between -40°C and 125°C after calibration that delivers a ratiometric analog output voltage and a pulse density digital output. Two on-chip sensors are cointegrated: a surface micromachined capacitive pressure sensor and temperature sensor using parasitic bipolar transistors. The surface-micromachined capacitive pressure sensor is fully compatible to a standard CMOS-process and therefore cost-optimized when compared to piezoresistive sensor elements. The sensor signal processing covers the sensor readout, the linearization, and the temperature sensor based compensation of the temperature sensitivity. A highly efficient parallel and automated calibration based on Sigma-Delta-modulators requires only a few calibration points for full pressure and temperature range. The two-dimensional calibration procedure has been optimised for parallel processing and allows efficient mass production. The sensor chip family has been fabricated in an 1.2µm CMOS-process with surface micromachining extension and occupies a chip area of 11.8mm2. The power consumption of the sensor chip is 6 mW using a 5 V power supply.

: http://publica.fraunhofer.de/dokumente/N-1196.html