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Improved silicon master tools for hot embossing

: Baum, M.; Nestler, J.; Rost, D.; Weissmantel, S.; Otto, T.; Reisse, G.; Gessner, T.

Reichl, H. ; Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration -IZM-, Berlin:
Micro System Technologies 2005 : Micro Electro, Opto, Mechanical Systems & Components International Conference & Exhibition, October 5-6, 2005, Munich, Germany
Poing: Franzis, 2005
ISBN: 3-7723-7040-3
International Conference on Micro Electro, Opto, Mechanical Systems & Components <2005, München>
Fraunhofer IZM ()
Fraunhofer ENAS ()

This paper focuses on the improvement of micromachined silicon tools by protective coatings which incorporate both low friction/low stiction properties and high hardness values. Such coatings like DLC (ta-C) and TiN are known from tool making and forming in mechanical engineering and will be investigated for micro structured silicon hot embossing tools.