Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Improved silicon master tools for hot embossing
| Reichl, H. ; Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration -IZM-, Berlin:
Micro System Technologies 2005 : Micro Electro, Opto, Mechanical Systems & Components International Conference & Exhibition, October 5-6, 2005, Munich, Germany
Poing: Franzis, 2005
ISBN: 3-7723-7040-3
S.76-82 |
| International Conference on Micro Electro, Opto, Mechanical Systems & Components <2005, München> |
|
| Englisch |
| Konferenzbeitrag |
| Fraunhofer IZM ()
Fraunhofer ENAS () |
Abstract
This paper focuses on the improvement of micromachined silicon tools by protective coatings which incorporate both low friction/low stiction properties and high hardness values. Such coatings like DLC (ta-C) and TiN are known from tool making and forming in mechanical engineering and will be investigated for micro structured silicon hot embossing tools.