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New materials for sputtered strain gauges

: Heckmann, U.; Bandorf, R.; Gerdes, H.; Lübke, M.; Schnabel, S.; Bräuer, G.

Postprint (PDF; )

Procedia chemistry. Online journal 1 (2009), Nr.1, S.64-67
ISSN: 1876-6196
Eurosensors <23, 2009, Lausanne>
Zeitschriftenaufsatz, Konferenzbeitrag, Elektronische Publikation
Fraunhofer IST ()
strain gauge; gauge factor; strain sensitivity; DLC; ITO; TCR

Commercial strain gauges obtain a gauge factor of approximately 2 with a compensated temperature coefficient of resistivity (TCR). Therefore, material development for sputtered thin films with a high gauge factor and negligible TCR was conducted. The object for self compensated sensor materials is the combination of a semiconducting material (negative TCR) with high gauge factor and a metal (positive TCR) leading to a TCR close to zero. With nickel containing diamond-like carbon films (Ni-DLC or a-C:H:Ni) and Ag-ITO compounds zero crossing in TCR and gauge factors higher than 10 were achieved.