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Two magnification steps EUV microscopy with a Schwarzschild objective and an adapted zone plate lens
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2009
Conference Paper
Titel
Two magnification steps EUV microscopy with a Schwarzschild objective and an adapted zone plate lens
Author(s)
Juschkin, L.
Freiberger, R.
Hauptwerk
EUV and x-ray optics. Synergy beetween laboratory and space
Konferenz
Europe Conference EUV and X-Ray Optics - Synergy Beetween Laboratory and Space 2009
Europe Optics + Optoelectronics Sympoium 2009
DOI
10.1117/12.822986
Language
English
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Fraunhofer-Institut für Lasertechnik ILT