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Heat treatable TCO film for position 1 based on HiPIMS

: Sittinger, V.; Horstmann, F.; Boentoro, W.; Werner, W.; Szyszka, B.

Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Society of Vacuum Coaters. 52nd Annual Technical Conference 2009. Proceedings : May 9-14, 2009, Santa Clara, CA USA
Albuquerque: SVC, 2009
ISBN: 978-1-878068-29-3
Society of Vacuum Coaters (Annual Technical Conference) <52, 2009, Santa Clara/Calif.>
Fraunhofer IST ()

Functional coatings on position 1 produce a huge interest in many fields of applications. Since these coatings are exposed to atmospheric conditions and natural environment such as dust, dirt or salt, their resistance to mechanical abrasion and their chemical stability is crucial for their function over lifetime. The use of float glass and a heat treatable and bendable coating is necessary for cost-effective production of curved and toughened glass.
At Fraunhofer IST a transparent conductive oxide (TCO) coating has been developed for position 1 based on a high power impulse magnetron sputtering (HiPIMS) generator. For depositing ITO films at varying deposition parameter a prototype power supply from Advanced Energy was used. This technique offers the interesting possibility to achieve films with low surface roughness and excellent conductivity by using an inline sputter coater. The ionization of the sputtered material helps structuring the formation in the initial steps of film growth. The deposition at low substrate temperatures shows superior electrical properties compared to DC sputtering [1]. Fields of application for this coating are photovoltaics, low emissivity coatings, heat mirrors or panel heaters as well as touch panels and displays. ITO film properties have been studied by optical spectroscopy (UV/VIS), atomic force microscopy (AFM) and x-ray diffraction (XRD) measurements. Mechanical stability has been tested by taber abrasion and analysed with haze measurements. Furthermore, the results are compared to conventional DC sputtered ITO films and evaluated in respect of lifetime stability as well as coat and bend applicability.