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Design tools and simulations for plasma processing in large area coaters

: Pflug, A.; Siemers, M.; Szyszka, B.

Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Society of Vacuum Coaters. 52nd Annual Technical Conference 2009. Proceedings : May 9-14, 2009, Santa Clara, CA USA
Albuquerque: SVC, 2009
ISBN: 978-1-878068-29-3
Society of Vacuum Coaters (Annual Technical Conference) <52, 2009, Santa Clara/Calif.>
Fraunhofer IST ()

Due to the increasing demands on size, throughput and precision, the development and optimization process of plasma deposition sources by empirical methods suffers from the increasing complexity and construction costs. For this reason, the development of simulation models for low-pressure plasma deposition processes has been subject of large R&D efforts during the past decade. However, substantial progress has been possible only within the last few years due to the increasing availability of parallel hard- and software architectures.
With the use of massive parallelization we implemented a full featured 3D simulation environment for low pressure gas flow and plasma discharge phenomena based on the Particle-in-Cell Monte-Carlo (PIC-MC) approach, which can be applied on CAD data of industrial coating setups. This work gives an overview of different issues in low-pressure plasma deposition processes, whereof the understanding has been improved by the use of simulation models.
The low-pressure gas flow and plasma simulation has been proven to be a design tool for efficient development of advanced low-pressure plasma deposition sources.