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Fabrication of field emitter array using focused ion and electron beam induced reaction
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1998
Conference Paper
Titel
Fabrication of field emitter array using focused ion and electron beam induced reaction
Author(s)
Takai, M.
Kishimoto, T.
Morimoto, H.
Park, Y.K.
Lipp, S.
Lehrer, C.
Frey, L.
Ryssel, H.
Hosono, A.
Kawabuchi, S.
Hauptwerk
Micro- and nanoengineering 97 - MNE. Proceedings of the International Conference on Micro- and Nanofabrication 1997
Konferenz
International Conference on Micro- and Nanofabrication (MNE) 1997
DOI
10.1016/S0167-9317(98)00105-1
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB