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EUV microscopy for defect inspection by dark-field mapping and zone plate zooming
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2009
Conference Paper
Titel
EUV microscopy for defect inspection by dark-field mapping and zone plate zooming
Author(s)
Juschkin, L.
Freiberger, R.
Bergmann, K.
Hauptwerk
9th International Conference on X-Ray Microscopy, XRM 2008. Proceedings
Konferenz
International Conference on X-Ray Microscopy (XRM) 2008
DOI
10.1088/1742-6596/186/1/012030
Language
English
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Fraunhofer-Institut für Lasertechnik ILT