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Fabrication of a low-frequency ultrasonic transducer

 
: Jia, C.; Wiemer, M.; Hiller, K.; Otto, T.; Gessner, T.

Gessner, T. ; MESAGO Messe Frankfurt GmbH, Stuttgart:
Smart systems integration 2008 : 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components, Barcelona, Spain, 9 - 10, April 2008
Berlin: VDE-Verlag, 2008
ISBN: 978-3-8007-3081-0
ISBN: 3-8007-3081-2
S.443-446
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components <2, 2008, Barcelona>
Englisch
Konferenzbeitrag
Fraunhofer ENAS ()
Fraunhofer IZM ()

: http://publica.fraunhofer.de/dokumente/N-111572.html