Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Micro machining technologies for non silicon materials
| Gessner, T. ; MESAGO Messe Frankfurt GmbH, Stuttgart:
Smart systems integration 2008 : 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components, Barcelona, Spain, 9 - 10, April 2008
Berlin: VDE-Verlag, 2008
ISBN: 978-3-8007-3081-0
ISBN: 3-8007-3081-2
S.395-398 |
| European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components <2, 2008, Barcelona> |
|
| Englisch |
| Konferenzbeitrag |
| Fraunhofer IFAM ()
Fraunhofer ENAS ()
Fraunhofer IZM () |