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Test structures for continuous determination of electrical parameters of substrate material up to 79 GHz

: Salhi, F.; Werner, J.; Sommer, G.; Graf, J.; Fiedler, M.; Reich, H.


IEEE Components, Packaging, and Manufacturing Technology Society; IEEE Computer Society, Test Technology Technical Council -TTTC-:
9th IEEE Workshop on Signal Propagation on Interconnects 2005. Proceedings : May 10 - 13, 2005, Hotel "Dorint", Garmisch-Partenkirchen, Germany
Piscataway/NJ: IEEE, 2005
ISBN: 0-7803-9054-7
Workshop on Signal Propagation on Interconnects (SPI) <9, 2005, Garmisch-Partenkirchen>
Fraunhofer IZM ()

This paper describes the use of line resonators as well as micro strip lines for continuous monitoring of the electrical properties of a substrate material. On the basis of a high frequency substrate, a method for the determination of the electrical material parameter in a frequency range from 5 GHz to at least 79 GHz is presented. The focus is on the relative permittivity, and the dissipation factor. High frequency measurements are compared with the simulation results. Finally, the extracted material parameters are presented and discussed. Both methods are compared concerning accuracy and sensitivity.