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Research and development of active flexural actuator modules based on PZT thick films

: Flössel, M.; Gebhardt, S.; Schönecker, A.

Max-Planck-Institut für Chemische Physik fester Stoffe; Fraunhofer-Institut für Fertigungstechnik und Angewandte Materialforschung -IFAM-, Dresden:
APNFM 2008, Advanced processing for novel functional materials : 23-25 January 2008, International Congress Center Dresden, Germany
Dresden, 2008
International Conference Advanced Processing of Novel Functional Materials (APNFM) <2008, Dresden>
Fraunhofer IKTS ()
PZT; thick film; flexural actuator and bender respectively; sensor; electromechanical property

In sensor and actuator technology plane piezoelectric modules are suited for an active mechanical control of thin-walled structure components e.g. bender (and flexural actuators respectively) and vibration absorber. The present work concentrates on methodical examination of electromechanical properties of flexural actuator modules. Therefore screen printed PZT thick-film samples are produced on selected substrates used in Micro-Electro-Mechanical Systems - MEMS (e.g. aluminium oxide (Al2O3), Low Temperature Cofired Ceramics (LTCC) - plumbiferous/lead free, silicon (Si) - with thin films as diffusion barrier) and on steel with constant sinter conditions. The used thick-film paste is a special development of Fraunhofer IKTS. To compare the properties of the flexural actuator modules, measurements for determination dielectric constants Epsilon (f = 1 kHz) are accomplished before and after poling. The remanent polarisation Pr is measured at frequency f = 50 Hz and electric field strength of E = 2 and 3 kV/mm respectively. Mechanical parameters are presented by measurements of deflection and blocking force of flexural actuator modules. From a multiplicity of tested substrate materials Al2O3 (99,6%), LTCC DuPont 951 and Heraeus "HeraLock® Tape - HL2000" and Si with SiO2- and ZrO2-thin films were exposed as suitable.