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Fuzzy control of a spin-etching process

: Knobloch, J.; Koch, M.

Yusupbekov, N.R.:
WCIS 2002, World Conference on Intelligent Systems for Industrial Automation. Proceedings : Tashkent, Uzbekistan, June 4-5, 2002
Kaufering: B-Quadrat-Verlagsges., 2002
ISBN: 3-933609-12-7
S.154-160 : Lit.
World Conference on Intelligent Systems for Industrial Automation (WCIS) <2, 2002, Tashkent>
Fraunhofer IMS, Außenstelle Dresden ( IPMS) ()
fuzzy control; image processing; end-point detection; semiconductor equipment

To determine the exact duration of liquid etching processes on spin-etchers an add-on device was developed which analyses optical properties of the wafer surface through a camera. The image processing is performed on normal PC hardware. A modular software structure is described, and the results of applying fuzzy methods in various parts of the algorithm are presented.