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Framework for the performance assessment of shop-floor control systems

 
: Mönch, L.; Rose, O.; Sturm, R.

Mackulak, G.T.:
International Conference on Modeling and Analysis of Semiconductor Manufacturing, MASM 2002. Proceedings : April 10 - 12, 2002, Tempe, Arizona, USA
Tempe, Ariz., 2002
S.95-100
International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM) <2002, Tempe/Ariz.>
Englisch
Konferenzbeitrag
Fraunhofer IPA ()
semiconductor manufacturing; shop floor control; software; Halbleiter; Fertigung; simulation

Abstract
In this paper we discuss the concept and design criteria for a framework that facilitates the performance assessment of shop-floor control systems. Our basic concept includes a simulation model that emulates the shop-floor of a wafer fab, sends information to the control system, and receives information back from the control system. The shop-floor control system is realized as a separate module that interfaces to the simulator via a data layer that contains the current shop floor status and the control information generated by the controller. We provide detailed information on how simulation model and shop-floor control system communicate and how each system triggers events in the other system. In addition, we show how this framework supports the performance assessment of the shop-floor control system under consideration. We present a prototype of the framework currently implemented in the course of the SRC/International Sematech FORCe project "Scheduling of Semiconductor Wafer Fabrication Facilities".

: http://publica.fraunhofer.de/dokumente/N-10262.html