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A field mill based on the modular MEMs framework Match-X

 
: Matuscheck, P.; Evers, J.; Schäfer, W.; Nienhaus, M.; Kleen, S.

Borgmann, H.:
Actuator 2002 : 8th International Conference on New Actuators & 2nd International Exhibition on Smart Actuators and Drive Systems, 10-12 June 2002, Bremen, Germany
Bremen, 2002
ISBN: 3-933339-04-9
S.316-320
International Conference on New Actuators <8, 2002, Bremen>
International Exhibition on Smart Actuators and Drive Systems <2, 2002, Bremen>
Englisch
Konferenzbeitrag
Fraunhofer IPA ()
framework; Match-X; modular MEMS; field mill; in situ-Meßtechnik; Oberflächenprüfung; Meßverfahren; Miniaturisierung; Halbleiter; Fertigung

Abstract
This paper presents a miniaturised field mill based on the modular MEMS framework Match-X. The field mill will be used for the measurement of the electrostatic field strength of charged surfaces e.g. for the in-situ qualification of semiconductor process equipment. The electrical, geometrical and mechanical Match-X compatible interfaces of the field mill will be explained. Furthermore, a detailed description of the concept for the miniaturisation and development of the measurement electronic and the motor driving electronic will be given. First measurements of charged surfaces proved the functionality of the measurement head.

: http://publica.fraunhofer.de/dokumente/N-10136.html