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Silicon nitride, silicon dioxide, and emerging dielectrics

Proceedings of the Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films and Emerging Dielectrics, Part of the 215th Meeting of the Electrochemical Society; San Francisco, CA, May 24-29, 2009
 
: Sah, R.E.; Deen, M.J.; Zhang, J.F.; Yota, J.; Toriumi, A.

New Jersey: Electrochemical Society, 2009, 858 S.
ECS transactions, 19
International Symposium on Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics <10, 2009, San Francisco/Calif.>
ISBN: 978-1-56677-710-0
ISSN: 1938-5862
Englisch
Tagungsband
Fraunhofer IAF ()

: http://publica.fraunhofer.de/dokumente/N-100566.html