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Stability of solid electrolyte based thick-film CO2 sensors

Stabilität von festelektrolyt-basierten CO2-Dickschichtsensoren
: Belda, C.; Fritsch, M.; Feller, C.; Westphal, D.; Jung, G.


Microelectronics reliability 49 (2009), Nr.6, S.614-620
ISSN: 0026-2714
International Microelectronics and Packaging Society (IMAPS-CPMT Poland International Conference) <32, 2009, Pultusk>
Zeitschriftenaufsatz, Konferenzbeitrag
Fraunhofer IKTS ()
electrolyte; solid electrolyte

Long-term stability is one of the major issues in the ongoing development of solid electrolyte based, screen-printed potentiometric CO2 sensors. Though improvements of the sensor have been reported by several research groups, mostly due to changes in material combinations, little is referred to the influence of basic technological aspects in relation to the observable degradation effects. In view of this aspect potentiometric thick-film CO2 sensors based on the electrochemical cell: Au, O2, CO2 Ma2CO3-MeCO3 (Au) Na-beta/beta'-Al2O3 Na2Si2O5 SiO2 (Au) O2, (CO2), Au {Ma = Na or Li; Me = Ba or Ca} were investigated regarding the long-term stability at improved operating conditions. As previous works at the IKTS in Dresden have shown that the microstructure of the Na-beta-aluminate (NBA) and the sensor preheating conditions have considerable influence on the stability, now different carbonate materials where evaluated regarding the influence on stability at improved operating conditions. So far, satisfying performance over more than 2000 h was demonstrated independent of the carbonate material used in the miniaturized CO2 sensor.