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Structuring of poly ether ether ketone by ArF excimer laser radiation in different atmospheres

: Feng, Y.; Gottmann, J.; Kreutz, E.W.


Applied surface science 211 (2003), Nr.1-4, S.68-75
ISSN: 0169-4332
Fraunhofer ILT ()
ArF excimer laser radiation; poly ether ether ketone; roughness; debris; plasma expansion

Structuring of poly ether ether ketone (PEEK) by 193 nm ArF excimer laser radiation has been investigated. Experiments were carried out in different atmospheres (air, vacuum, Ar, O2) in order to study its influence on the quality of the structures and the formation of the debris. Repetition rate makes little effect on the ablation rate and roughness of the structure in presence of any kind of atmosphere, indicating for the structuring of PEEK by ArF laser radiation a large window of processing. The roughness at the bottom of the structures and the morphology of the side walls are strongly affected by the properties of the atmosphere. The smallest roughness is achieved at 0.6 J/cm2 for all kinds of processing gases. Debris around the structures can be diminished by structuring in vacuum. Plasma expansion speed has been measured by using high speed photography.