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Pulse magnetron sputtering - development and application trends
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2002
Conference Paper
Titel
Pulse magnetron sputtering - development and application trends
Author(s)
Winkler, T.
Hauptwerk
Society of Vacuum Coaters. 45th Annual Technical Conference 2002. Proceedings
Konferenz
Society of Vacuum Coaters (Annual Technical Conference) 2002
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP