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Micro Materials Center Berlin - materials research for MEMS packaging
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2002
Conference Paper
Titel
Micro Materials Center Berlin - materials research for MEMS packaging
Author(s)
Michel, B.
Winkler, T.
Hauptwerk
Materials Week 2001. Proceedings. CD-ROM
Konferenz
Werkstoffwoche 2001
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM