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Application of combined thermal and electrical simulation for optimization of deep submicron interconnection systems
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2002
Conference Paper
Titel
Application of combined thermal and electrical simulation for optimization of deep submicron interconnection systems
Author(s)
Streiter, R.
Wolf, H.
Zhu, Z.
Xiao, X.
Gessner, T.
Hauptwerk
Materials for advanced metallization. Proceedings of the Fifth European Workshop on Materials for Advanced Metallization
Konferenz
European Workshop on Materials for Advanced Metallization (MAM) 2001
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM