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Application of combined thermal and electrical simulation for optimization of deep submicron interconnection systems

 
: Streiter, R.; Wolf, H.; Zhu, Z.; Xiao, X.; Gessner, T.

Zhang, S.-L.:
Materials for advanced metallization. Proceedings of the Fifth European Workshop on Materials for Advanced Metallization : Sigtuna, Sweden, March 5 - 7, 2001
Amsterdam: Elsevier, 2002 (Microelectronic engineering 60.2001,1/2)
European Workshop on Materials for Advanced Metallization (MAM) <5, 2001, Sigtuna>
Englisch
Konferenzbeitrag
Fraunhofer IZM ()

: http://publica.fraunhofer.de/dokumente/B-79724.html