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Monolithic integration of vibration sensors in near surface bulk silicon micromachining with microelectronics
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2001
Conference Paper
Titel
Monolithic integration of vibration sensors in near surface bulk silicon micromachining with microelectronics
Author(s)
Steiniger, D.
Bertz, A.
Gessner, T.
Hauptwerk
Micro System Technologies 2001
Konferenz
International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components 2001
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM