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Laser ablation - a new low-cost approach for passivated rear contact formation in crystalline silicon solar cell technology

: Preu, R.; Glunz, S.W.; Schäfer, S.; Lüdemann, R.; Wettling, W.; Pfleging, W.

Scheer, H. ; European Commission:
Sixteenth European Photovoltaic Solar Energy Conference 2000 : Proceedings of the international conference held in Glasgow, United Kingdom, 1 - 5 May 2000
London: James & James, 2000
ISBN: 1-902916-18-2
European Photovoltaic Solar Energy Conference <16, 2000, Glasgow>
Fraunhofer ISE ()

The ablation of passivating layers using laser radiation offers a new way of defining the rear contact pattern for the passivated emitter and rear cell (PERC) concept. The KrF-Excimer laser has been identified to be a suitable tool for the ablation process. The laser process has been optimised in order to realise well-defined and shallow holes in silicon dioxide and silicon nitride using excimer laser ablation. Solar cell efficiencies of up to 20.4 % and 19.7 %, respectively have been realised by applying this process to the W-PERC cell concept without using any laserdainage etching. Process times below 3 s can be realised for enhanced use of beam power using a microlens array. The process can be fully integrated in a vacuum process for rear contact formation. The laser ablation approach seems to offer a bright perspective of highly efficient rear contact formation for future thin and large solar cells.