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High density pulsed plasma for the deposition of hard coatings on three-dimensional substrates
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2002
Conference Paper
Titel
High density pulsed plasma for the deposition of hard coatings on three-dimensional substrates
Author(s)
Klostermann, T.
Fietzke, F.
Zywitzki, O.
Goedicke, K.
Hauptwerk
Society of Vacuum Coaters. 45th Annual Technical Conference 2002. Proceedings
Konferenz
Society of Vacuum Coaters (Annual Technical Conference) 2002
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP