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Energetic substrate bonbardment in reactive sputtering with flange-mounted magnetrons in different pulse modes

 
: Bartzsch, H.; Frach, P.; Goedicke, K.; Gottfried, C.

Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Society of Vacuum Coaters. 45th Annual Technical Conference 2002. Proceedings : April 13-18, 2002, Lake Buena Vista, Florida USA
Albuquerque: SVC, 2002
S.196-201
Society of Vacuum Coaters (Annual Technical Conference) <45, 2002, Lake Buena Vista/Fl.>
Englisch
Konferenzbeitrag
Fraunhofer FEP ()

: http://publica.fraunhofer.de/dokumente/B-77493.html