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Energetic substrate bonbardment in reactive sputtering with flange-mounted magnetrons in different pulse modes
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2002
Conference Paper
Titel
Energetic substrate bonbardment in reactive sputtering with flange-mounted magnetrons in different pulse modes
Author(s)
Bartzsch, H.
Frach, P.
Goedicke, K.
Gottfried, C.
Hauptwerk
Society of Vacuum Coaters. 45th Annual Technical Conference 2002. Proceedings
Konferenz
Society of Vacuum Coaters (Annual Technical Conference) 2002
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP