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Simulation in the design process of microsystems
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1996
Conference Paper
Titel
Simulation in the design process of microsystems
Author(s)
Maurer, A.
Schulte, S.
Schwarz, P.
Hauptwerk
Micro System Technologies '96
Konferenz
International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components 1996
Language
English
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Fraunhofer-Institut für Integrierte Schaltungen IIS