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A new approach for handling and transferring of thin semiconductor materials
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2001
Conference Paper
Titel
A new approach for handling and transferring of thin semiconductor materials
Author(s)
Bagdahn, J.
Katzer, D.
Petzold, M.
Wiemer, M.
Alexe, M.
Dragoi, V.
Gösele, U.
Hauptwerk
Micro System Technologies 2001
Konferenz
International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components 2001
Language
English
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Fraunhofer-Institut fĂĽr Werkstoffmechanik IWM