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2001
Conference Paper
Titel
Ultra precision manufacturing of self-assembled micro systems
Abstract
This paper introduces a new microfabrication technique that combines ultraprecision micro machining (Milling, turning, drilling, and grinding) with sacrifical/structural multi-layer manufacturing processes to produce assembled, three-dimensional microsystems. These systems can comprise true 3-dimensional features that span in size from micrometers through millimeters and can be manufactured from a variety of metallic and polymer materials.
Language
English
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